SK Hynix develops reusable semiconductor CMP polishing pad technology

SK Hynix has recently developed a reusable CMP polishing pad technology, which not only reduces costs but also enhances ESG (Environmental, Social, Governance) management.

SK Hynix stated that reusable CMP polishing pads will be deployed in low-risk processes first, and then gradually expand their application scope.

IT Home Note: CMP technology is a process that enables the surface of a polished material to achieve the required flatness under the combined action of chemical and mechanical factors. The chemical components in the polishing solution react with the material surface to form a soft layer that is easy to polish. The polishing pad and abrasive particles in the polishing solution physically and mechanically polish the material surface to remove the soft layer.

SK Hynix develops reusable semiconductor CMP polishing pad technology

In the CMP process, the main functions of polishing pads are:

Effectively and uniformly distribute the polishing fluid throughout the entire processing area, and provide new supplementary polishing fluid for a polishing fluid cycle;

Remove residues generated during the polishing process (such as polishing debris, polishing debris, etc.) from the polished surface of the workpiece;

Transfer the mechanical load required for material removal;

Maintain the mechanical and chemical environment required for the polishing process. In addition to the mechanical properties of polishing pads, their surface microstructure characteristics, such as micropore shape, porosity, groove shape, etc., can determine polishing efficiency and flatness indicators by affecting the flow and distribution of polishing solution.

SK Hynix uses CMP polishing pad dial texture reconstruction method to ensure that the polishing pad can be reused.

About 70% of CMP polishing pads in South Korea use foreign products and are highly dependent on foreign countries. The breakthrough in this technology can promote further independence in the South Korean semiconductor industry.